Placement module, and positioning apparatus and inspection equipment with the placement module in which an object to be inspected can be inspected in a correct position
The present invention provides a placement module, and a positioning apparatus and inspection equipment with the placement module. The placement module is provided with a placement seat, and the placement seat has a positioning seat with a sucking hole. An air pressure joint is disposed on the place...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present invention provides a placement module, and a positioning apparatus and inspection equipment with the placement module. The placement module is provided with a placement seat, and the placement seat has a positioning seat with a sucking hole. An air pressure joint is disposed on the placement seat for introducing negative pressure to communicate with the sucking hole through an air channel inside the placement seat. A plurality of sliding seats is disposed on one side of the upper surface of the placement seat, and each can be displaced on a slide rail. Each sliding seat is provided with an abutment part, and the abutment parts jointly define an accommodation region. The sliding seat is linked with a clamping member, and the clamping members jointly define a clamping area. Thereby, an object to be inspected can be inspected in a correct position. |
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