Removal of metal salt precipitates in an electroplating tool

Examples are disclosed that relate to the removal of metal salt precipitates from within a circulating loop of an electroplating tool. In one example, during a processing phase of operation, a melt salt solution is flowed through a circulating loop at a process temperature to deposit a metal on a su...

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Hauptverfasser:	ONG, BOON KANG, SIGAMANI, NIRMAL SHANKAR, MARTIN, DANIEL JAMES, CHUA, LEE, WILMOT, FREDERICK DEAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS THEREFOR CHEMISTRY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
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creator	ONG, BOON KANG SIGAMANI, NIRMAL SHANKAR MARTIN, DANIEL JAMES CHUA, LEE WILMOT, FREDERICK DEAN
description	Examples are disclosed that relate to the removal of metal salt precipitates from within a circulating loop of an electroplating tool. In one example, during a processing phase of operation, a melt salt solution is flowed through a circulating loop at a process temperature to deposit a metal on a substrate. The metal salt solution comprises at least a metal cation and a counter ion. In a precipitate removal phase of operation, the metal salt solution is heated to a temperature higher than the process temperature. The heated metal salt solution is then flowed through the circulating loop for a duration to dissolve metal salt precipitates of the metal solution within the circulating loop. The metal salt solution is then cooled to the process temperature.
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subjects	APPARATUS THEREFOR CHEMISTRY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
title	Removal of metal salt precipitates in an electroplating tool
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