Removal of metal salt precipitates in an electroplating tool
Examples are disclosed that relate to the removal of metal salt precipitates from within a circulating loop of an electroplating tool. In one example, during a processing phase of operation, a melt salt solution is flowed through a circulating loop at a process temperature to deposit a metal on a su...
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Zusammenfassung: | Examples are disclosed that relate to the removal of metal salt precipitates from within a circulating loop of an electroplating tool. In one example, during a processing phase of operation, a melt salt solution is flowed through a circulating loop at a process temperature to deposit a metal on a substrate. The metal salt solution comprises at least a metal cation and a counter ion. In a precipitate removal phase of operation, the metal salt solution is heated to a temperature higher than the process temperature. The heated metal salt solution is then flowed through the circulating loop for a duration to dissolve metal salt precipitates of the metal solution within the circulating loop. The metal salt solution is then cooled to the process temperature. |
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