Removal of metal salt precipitates in an electroplating tool

Examples are disclosed that relate to the removal of metal salt precipitates from within a circulating loop of an electroplating tool. In one example, during a processing phase of operation, a melt salt solution is flowed through a circulating loop at a process temperature to deposit a metal on a su...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ONG, BOON KANG, SIGAMANI, NIRMAL SHANKAR, MARTIN, DANIEL JAMES, CHUA, LEE, WILMOT, FREDERICK DEAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Examples are disclosed that relate to the removal of metal salt precipitates from within a circulating loop of an electroplating tool. In one example, during a processing phase of operation, a melt salt solution is flowed through a circulating loop at a process temperature to deposit a metal on a substrate. The metal salt solution comprises at least a metal cation and a counter ion. In a precipitate removal phase of operation, the metal salt solution is heated to a temperature higher than the process temperature. The heated metal salt solution is then flowed through the circulating loop for a duration to dissolve metal salt precipitates of the metal solution within the circulating loop. The metal salt solution is then cooled to the process temperature.