Method for manufacturing hydrogen sensor and its use for detecting complete combustion of hydrogen power generation capable of solving the problem of cost increase caused by the use of high-sensitivity sensors in hydrogen power generation

A method for manufacturing a hydrogen sensor and its use for detecting complete combustion of hydrogen power generation can solve the problem of cost increase caused by the use of high-sensitivity sensors in hydrogen power generation. The method includes: performing a thermal oxidation process to coat a silicon dioxide layer on a silicon substrate; using an evaporation technology to deposit a chromium-gold film as an electrode layer for coating the silicon dioxide layer; performing a sputtering process in which the sputtering power of a zinc oxide target is set at 120 watts and the sputtering power of a cobalt target is set between 10 watts and 35 watts, and the electrode layer is sputtered for 60 to 65 minutes to coat the electrode layer with a cobalt-doped zinc oxide thin film layer. When a hydrogen gas is introduced into a power generation device for power generation, the surface electron concentration of the cobalt-doped zinc oxide thin film layer is increased due to the attachment of the incompletely bur