Method for identifying abnormal distribution and electronic apparatus

A method for identifying abnormal distribution and an electronic apparatus are provided. A probability plot is generated based on the test data of wafer acceptance test (WAT). The test data includes multiple test values corresponding to a test item, and failure wafer count corresponding to each test...

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Hauptverfasser: LU, CHIEN-HUI, CHE, SHYNG-YEUAN
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CHE, SHYNG-YEUAN
description A method for identifying abnormal distribution and an electronic apparatus are provided. A probability plot is generated based on the test data of wafer acceptance test (WAT). The test data includes multiple test values corresponding to a test item, and failure wafer count corresponding to each test value. A feature vector is obtained from the probability plot. A rectified function is used to filter the feature vector and a filtered vector is obtained. A kurtosis management coefficient is calculated based on a smoothing matrix, the filtered vector and its transposed matrix to determine whether there is an abnormal distribution based on the kurtosis management coefficient.
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language chi ; eng
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subjects BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
SEMICONDUCTOR DEVICES
title Method for identifying abnormal distribution and electronic apparatus
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