Method for identifying abnormal distribution and electronic apparatus
A method for identifying abnormal distribution and an electronic apparatus are provided. A probability plot is generated based on the test data of wafer acceptance test (WAT). The test data includes multiple test values corresponding to a test item, and failure wafer count corresponding to each test...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A method for identifying abnormal distribution and an electronic apparatus are provided. A probability plot is generated based on the test data of wafer acceptance test (WAT). The test data includes multiple test values corresponding to a test item, and failure wafer count corresponding to each test value. A feature vector is obtained from the probability plot. A rectified function is used to filter the feature vector and a filtered vector is obtained. A kurtosis management coefficient is calculated based on a smoothing matrix, the filtered vector and its transposed matrix to determine whether there is an abnormal distribution based on the kurtosis management coefficient. |
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