Method for identifying abnormal distribution and electronic apparatus

A method for identifying abnormal distribution and an electronic apparatus are provided. A probability plot is generated based on the test data of wafer acceptance test (WAT). The test data includes multiple test values corresponding to a test item, and failure wafer count corresponding to each test...

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Bibliographische Detailangaben
Hauptverfasser: LU, CHIEN-HUI, CHE, SHYNG-YEUAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A method for identifying abnormal distribution and an electronic apparatus are provided. A probability plot is generated based on the test data of wafer acceptance test (WAT). The test data includes multiple test values corresponding to a test item, and failure wafer count corresponding to each test value. A feature vector is obtained from the probability plot. A rectified function is used to filter the feature vector and a filtered vector is obtained. A kurtosis management coefficient is calculated based on a smoothing matrix, the filtered vector and its transposed matrix to determine whether there is an abnormal distribution based on the kurtosis management coefficient.