Apparatus for and method of vibration cancellation for laser wavelength and bandwidth stability

An apparatus for and method of reducing the effects of vibrations on components in modules of a deep ultraviolet light source. The components are provided with sensors to sense vibration waveforms and actuators for applying a waveform opposed to and so cancelling the vibration waveform. In addition...

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Bibliographische Detailangaben
1. Verfasser:	KHAMEHCHI, MOHAMMAD
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BLASTING CINEMATOGRAPHY ELECTROGRAPHY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MATERIALS THEREFOR MEANS FOR DAMPING VIBRATION MECHANICAL ENGINEERING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SHOCK-ABSORBERS SPRINGS THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	An apparatus for and method of reducing the effects of vibrations on components in modules of a deep ultraviolet light source. The components are provided with sensors to sense vibration waveforms and actuators for applying a waveform opposed to and so cancelling the vibration waveform. In addition to application of active noise (vibration) cancellation the vibration waveform resulting from active vibration suppression is analyzed to identify residual vibrations to determine characteristics of a residual vibration cancelling waveform.