Multiple-zone gas box block surface heater

A gas conditioning apparatus comprises a substrate block comprising one or more fluid ports on an upper surface of the substrate block. The substrate block has a first length along a sidewall. The substrate block comprises an inlet port at a first end and an outlet port at a second end. A flow passa...

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Bibliographische Detailangaben
Hauptverfasser:	GANANY, ALON, PATIL, PAWAN M, STUMPF, JOHN F
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A gas conditioning apparatus comprises a substrate block comprising one or more fluid ports on an upper surface of the substrate block. The substrate block has a first length along a sidewall. The substrate block comprises an inlet port at a first end and an outlet port at a second end. A flow passage extends within the substrate block between the inlet port and the outlet port and is in fluidic communication with the one or more fluid ports. At least one heater strip is on the sidewall of the substrate block. The at least one heater strip extends between the first end and the second end and is to control an internal temperature within a zone of the substrate block. The zone has a second length that is less than or substantially equal to the first length.