Temperature adjustment device, inspection device, and temperature adjustment method

Provided are: a temperature adjustment device that facilitates the shortening of the time taken to set an internal temperature of an object to be temperature-adjusted to a target temperature range; an inspection device for inspecting the object; and a temperature adjustment method. This temperature adjustment device 1 comprises: a housing 2; a cooling platform 61 that is disposed in the housing 2 and has a cooling surface 611 capable of contacting an object DUT; a cooling unit 64 that cools the cooling platform 61 to a cooling temperature TC lower than a lower limit value TL of a pre-set target temperature range; a conveyance mechanism 5 that brings the object DUT into contact with the cooling surface 611 and then separates the object from the cooling surface 611; and a fan 25 that heats the object DUT separated from the cooling surface 611 by the conveyance mechanism 5.