Transfer apparatus and method for memorizing position information capable of storing the position information of the holding unit while transferring a wafer by a robot from a first position to a second position

In the transfer apparatus and a method for memorizing position information, a transfer position can be easily stored in a memory unit. A transfer apparatus comprises: a holding unit 6 that holds a processed workpiece (wafer 90); a moving mechanism 2 that moves the holding unit 6; and a control unit 3 that controls the moving mechanism 2. The moving mechanism 2 includes a controller 213 that supplies electrical power to a servo motor 211 and reads a value of the encoder 212. After connection between the servo motor 211 and the controller 213 is broken in a state where the encoder 212 and the controller 213 are connected, the control unit 3 comprises: a first memory unit 31 that moves the holding unit 6 in the horizontal direction to a first position directly above or below the first place 181 by an operator and stores the value of the encoder 212; and a second memory unit32 that moves the holding unit 6 in the horizontal direction to a second position directly above or below the second place 182 by the operato