Carrier of probe card, transportation cart and stocker system

A carrier of probe card includes a substrate, a plurality of first supporting elements, a plurality of first fixing elements, a first protective cover and at least one elastic element. The first supporting elements are arranged on the substrate to support a first probe card, so that there is a first...

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Bibliographische Detailangaben
Hauptverfasser:	HSU, WEN-YUAN, HSIEH, CHENGIH, LIN, CHERNG-GANG, WANG, TZUIEN, HU, KAI-LIN, TSAI, HUGN-YI, LAI, YU-HENG, CHOU, SHIH-YING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A carrier of probe card includes a substrate, a plurality of first supporting elements, a plurality of first fixing elements, a first protective cover and at least one elastic element. The first supporting elements are arranged on the substrate to support a first probe card, so that there is a first distance between the first probe card and the substrate. The first fixing elements are arranged on the substrate for fixing the first probe card. The first protective cover is used to cover a plurality of probes on the first probe card. The elastic element is arranged on the substrate and connected with the first protective cover to push the first protective cover against the first probe card. The above-mentioned carrier of probe card can protect the probes of the probe card and facilitate mechanically assisted handling. A transportation cart and a stocker system of probe card using the above-mentioned carrier of probe card are are also disclosed.