Flexible supply structure, positioning module and lithographic apparatus

The invention provides a flexible supply structure for connecting a first movable object with a second object, wherein the flexible supply structure comprises a first permanent magnet having a first magnetic field orientation, wherein the flexible supply structure is arranged to be at least partiall...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CLOOSTERMAN, VINCENTIUS FRANSISCUS, NIJSSE, GERARD JOHANNES PIETER, CUIJPERS, MARTINUS AGNES WILLEM
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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