Flexible supply structure, positioning module and lithographic apparatus
The invention provides a flexible supply structure for connecting a first movable object with a second object, wherein the flexible supply structure comprises a first permanent magnet having a first magnetic field orientation, wherein the flexible supply structure is arranged to be at least partiall...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a flexible supply structure for connecting a first movable object with a second object, wherein the flexible supply structure comprises a first permanent magnet having a first magnetic field orientation, wherein the flexible supply structure is arranged to be at least partially supported by a support comprising a second magnet having a second magnetic field orientation such that the first permanent magnet and the second magnet are repulsing when the first permanent magnet and the second magnet are facing each other to exert a force on the flexible supply structure. |
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