Flexible supply structure, positioning module and lithographic apparatus

The invention provides a flexible supply structure for connecting a first movable object with a second object, wherein the flexible supply structure comprises a first permanent magnet having a first magnetic field orientation, wherein the flexible supply structure is arranged to be at least partiall...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CLOOSTERMAN, VINCENTIUS FRANSISCUS, NIJSSE, GERARD JOHANNES PIETER, CUIJPERS, MARTINUS AGNES WILLEM
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a flexible supply structure for connecting a first movable object with a second object, wherein the flexible supply structure comprises a first permanent magnet having a first magnetic field orientation, wherein the flexible supply structure is arranged to be at least partially supported by a support comprising a second magnet having a second magnetic field orientation such that the first permanent magnet and the second magnet are repulsing when the first permanent magnet and the second magnet are facing each other to exert a force on the flexible supply structure.