Photosensitive resin composition, cured product, multilayer body, method for producing cured product, method for producing multilayer body, method for producing semiconductor device, and semiconductor device

The present invention provides: a photosensitive resin composition which contains a polyimide precursor that contains a repeating unit represented by formula (1), a polymerizable compound and a photopolymerization initiator; a cured product; a multilayer body; a method for producing a cured product;...

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description The present invention provides: a photosensitive resin composition which contains a polyimide precursor that contains a repeating unit represented by formula (1), a polymerizable compound and a photopolymerization initiator; a cured product; a multilayer body; a method for producing a cured product; a method for producing a multilayer body; a method for producing a semiconductor device; and a semiconductor device. In the formula, Z1 represents an organic group which comprises two or more ether groups and a benzene ring structure; Y1 represents an organic group; each of A1 and A2 independently represents an oxygen atom or -NRZ-; RZ represents a hydrogen atom or an organic group; each of R1 and R2 independently represents a hydrogen atom or an organic group; and at least one of R1 and R2 represents an organic group that has an ethylenically unsaturated bond.
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language chi ; eng
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CHEMISTRY
CINEMATOGRAPHY
COMPOSITIONS BASED THEREON
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
LAYERED PRODUCTS
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
MATERIALS THEREFOR
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
ORIGINALS THEREFOR
PERFORMING OPERATIONS
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
THEIR PREPARATION OR CHEMICAL WORKING-UP
TRANSPORTING
title Photosensitive resin composition, cured product, multilayer body, method for producing cured product, method for producing multilayer body, method for producing semiconductor device, and semiconductor device
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