Photosensitive resin composition, cured product, multilayer body, method for producing cured product, method for producing multilayer body, method for producing semiconductor device, and semiconductor device

The present invention provides: a photosensitive resin composition which contains a polyimide precursor that contains a repeating unit represented by formula (1), a polymerizable compound and a photopolymerization initiator; a cured product; a multilayer body; a method for producing a cured product;...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	NOZAKI, ATSUYASU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention provides: a photosensitive resin composition which contains a polyimide precursor that contains a repeating unit represented by formula (1), a polymerizable compound and a photopolymerization initiator; a cured product; a multilayer body; a method for producing a cured product; a method for producing a multilayer body; a method for producing a semiconductor device; and a semiconductor device. In the formula, Z1 represents an organic group which comprises two or more ether groups and a benzene ring structure; Y1 represents an organic group; each of A1 and A2 independently represents an oxygen atom or -NRZ-; RZ represents a hydrogen atom or an organic group; each of R1 and R2 independently represents a hydrogen atom or an organic group; and at least one of R1 and R2 represents an organic group that has an ethylenically unsaturated bond.