Polishing head and polishing device

The present invention pertains to a polishing head for pressing a polishing tape against a substrate such as a wafer. The present invention also pertains to a polishing device for polishing a substrate using such a polishing head. A polishing head (10) comprises a pressing member (12) that presses a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FUJISAWA, MAO, KASHIWAGI, MAKOTO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention pertains to a polishing head for pressing a polishing tape against a substrate such as a wafer. The present invention also pertains to a polishing device for polishing a substrate using such a polishing head. A polishing head (10) comprises a pressing member (12) that presses a polishing tape (2) against a substrate (W), an actuator (15) that moves the pressing member (12) in a predetermined pressing direction (CL) and applies a pressing force to the pressing member (12), and a tilt adjusting mechanism (40) that adjusts the tilt of the pressing member (12) with respect to the pressing direction (CL). The tilt adjusting mechanism (40) is configured to tilt the pressing member (12) with respect to the pressing direction (CL) and keep the angle of the tilted pressing member (12).