Metal-oxide-metal capacitor structure

The disclosure provides a metal-oxide-metal capacitor structure, which includes at least a first finger electrode structure and a second finger electrode structure. The first finger electrode structure includes a plurality of first metal lines and a first electrode. The first metal lines extend alon...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CHEN, SHIH-BIN, YU, SZ-YING, CHANG, CHAN-YUAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The disclosure provides a metal-oxide-metal capacitor structure, which includes at least a first finger electrode structure and a second finger electrode structure. The first finger electrode structure includes a plurality of first metal lines and a first electrode. The first metal lines extend along a first direction, and the first electrode extends along a second direction and is connected to the first metal lines. The second finger electrode structure includes a plurality of second metal lines and a second electrode. The second metal lines extend along the first direction, and the second electrode extends along the second direction and is connected to the second metal lines. The first metal lines and the second metal lines are staggered each other and arranged between the first electrodes and the second electrodes, so that each first metal line is located between every two adjacent second metal lines.