Method of diagnosing failure location of control apparatus, diagnostic apparatus, control apparatus, lithography apparatus, article manufacturing method, and non-transitory computer-readable storage medium

A method of diagnosing a failure location of a control apparatus including a plurality of actuators each configured to apply a thrust to a target object, a plurality of sensors each configured to detect a state quantity of the target object, and a controller configured to control the plurality of ac...

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Bibliographische Detailangaben
Hauptverfasser:	KUSAYANAGI, HIROKAZU, HASHIMOTO, TAKUMI, HATA, TOMOYASU, ASAKURA, YASUNOBU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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Beschreibung
Zusammenfassung:	A method of diagnosing a failure location of a control apparatus including a plurality of actuators each configured to apply a thrust to a target object, a plurality of sensors each configured to detect a state quantity of the target object, and a controller configured to control the plurality of actuators, the method including comparing a first signal output from each of the plurality of sensors in a state in which the plurality of actuators and the plurality of sensors are considered to be normal with a second signal output from each of the plurality of sensors in a state in which the control apparatus is used, and diagnosing, as the failure location, a device including at least one of a failed actuator and a failed sensor based on a comparison result in the comparing.