Flexible stamp and method for manufacturing a flexible stamp and system for imprinting

The invention relates to flexible stamp configured for imprinting, in particular nanoimprinting, and a method for manufacturing such stamp. The stamp comprises a substantially flexible substrate, said substrate comprising at least one textured area, at least one functional element and at least two c...

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Bibliographische Detailangaben
Hauptverfasser:	TER MEULEN, JAN MATTHIJS, DEKKER, TIM, NEELEN, ROB ANTONIUS WALTHERUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	The invention relates to flexible stamp configured for imprinting, in particular nanoimprinting, and a method for manufacturing such stamp. The stamp comprises a substantially flexible substrate, said substrate comprising at least one textured area, at least one functional element and at least two conductive tracks which are connected or connectable to at least one functional element.