Suction stage and method for holding workpiece

A suction stage (10) comprises: a stage body (11) on which a workpiece (100) is placed; a plurality of suction holes (14) extending downward from a surface of the stage body (11) and communicating with a suction pump (20), the plurality of suction holes (14) each having a circular lateral cross-sect...

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Bibliographische Detailangaben
Hauptverfasser: UTANO, TETSUYA, MURAMATSU, HIROKATSU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A suction stage (10) comprises: a stage body (11) on which a workpiece (100) is placed; a plurality of suction holes (14) extending downward from a surface of the stage body (11) and communicating with a suction pump (20), the plurality of suction holes (14) each having a circular lateral cross-sectional shape; and at least one sealing ball (30) thrown from above into at least one suction hole (14), arbitrarily selected from the plurality of suction holes (14), to seal the suction hole (14).