Protection tape and manufacturing method of semiconductor device

A protection tape includes a first substrate layer, an adhesive layer and a shrinkage layer. The shrinkage layer is located between the first substrate layer and the adhesive layer. The thermal expansion coefficient of the shrinkage layer at 180 DEG C is larger than or equal to 100 [mu]m/m DEG C and...

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Bibliographische Detailangaben
Hauptverfasser: LIN, CHIN-KAI, HUANG, CHI-HUA, CHEN, CHUN-FA, XIE, SHI-ROU, CHEN, XUAN-YOU, LEE, CHEN-JU
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A protection tape includes a first substrate layer, an adhesive layer and a shrinkage layer. The shrinkage layer is located between the first substrate layer and the adhesive layer. The thermal expansion coefficient of the shrinkage layer at 180 DEG C is larger than or equal to 100 [mu]m/m DEG C and less than 400 [mu]m/m DEG C, and the hardness of the shrinkage layer is greater than the Shore 30A at 23 DEG C.