Protection tape and manufacturing method of semiconductor device
A protection tape includes a first substrate layer, an adhesive layer and a shrinkage layer. The shrinkage layer is located between the first substrate layer and the adhesive layer. The thermal expansion coefficient of the shrinkage layer at 180 DEG C is larger than or equal to 100 [mu]m/m DEG C and...
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Zusammenfassung: | A protection tape includes a first substrate layer, an adhesive layer and a shrinkage layer. The shrinkage layer is located between the first substrate layer and the adhesive layer. The thermal expansion coefficient of the shrinkage layer at 180 DEG C is larger than or equal to 100 [mu]m/m DEG C and less than 400 [mu]m/m DEG C, and the hardness of the shrinkage layer is greater than the Shore 30A at 23 DEG C. |
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