Pad conditioning brush

Pad conditioning brushes are described. In particular, pad conditioning brushes including a carrier layer and a plurality of abrasive particle-free brush bristles extending from the carrier layer are described. The carrier layer and the plurality of brush bristles form a unitary body. Such brushes m...

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Bibliographische Detailangaben
Hauptverfasser: LAGUDU, UMA RAMES KRISHNA, ALEXANDER, STEPHEN ROBERT, DWORSHAK, JEREMY KENNETH, HOBBS, TERRY RICHARD, LUECK, BRIAN WILLIAM, JAVID, SAMAD
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Pad conditioning brushes are described. In particular, pad conditioning brushes including a carrier layer and a plurality of abrasive particle-free brush bristles extending from the carrier layer are described. The carrier layer and the plurality of brush bristles form a unitary body. Such brushes may provide excellent performance compared to traditional conditioning disks.