Semiconductor processing device

Semiconductor processing device

The present invention relates to the technical field of semiconductor devices. Provided is a semiconductor processing device. The semiconductor processing device comprises: a visual unit, which is arranged on a shell of the semiconductor processing device and is used for observing the internal condi...

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Hauptverfasser: WANG, CHEN, JIA, ZHAO-WEI, WANG, HUI, YANG, HONGAO, WANG, JIAN
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator WANG, CHEN
JIA, ZHAO-WEI
WANG, HUI
YANG, HONGAO
WANG, JIAN
description The present invention relates to the technical field of semiconductor devices. Provided is a semiconductor processing device. The semiconductor processing device comprises: a visual unit, which is arranged on a shell of the semiconductor processing device and is used for observing the internal conditions of the semiconductor processing device; a clearing unit, which is arranged in the semiconductor processing device and is used for clearing away a target object of the visual unit that is located on the inner side of the device; and a driving unit, which is connected to the clearing unit and is used for driving the clearing unit, so as to clear away the target object of the visual unit that is located on the inner side of the device. In the semiconductor processing device of the present invention, a clearing unit is provided for a visual unit in a matching manner, so as to collaborate with the visual unit in monitoring a semiconductor processing process, thereby facilitating precise control over the technologi
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TW202343618A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TW202343618A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TW202343618A3</originalsourceid><addsrcrecordid>eNrjZJAPTs3NTM7PSylNLskvUigoyk9OLS7OzEtXSEkty0xO5WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8SHhRgZGxibGZoYWjsbEqAEAXE8lgA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Semiconductor processing device</title><source>esp@cenet</source><creator>WANG, CHEN ; JIA, ZHAO-WEI ; WANG, HUI ; YANG, HONGAO ; WANG, JIAN</creator><creatorcontrib>WANG, CHEN ; JIA, ZHAO-WEI ; WANG, HUI ; YANG, HONGAO ; WANG, JIAN</creatorcontrib><description>The present invention relates to the technical field of semiconductor devices. Provided is a semiconductor processing device. The semiconductor processing device comprises: a visual unit, which is arranged on a shell of the semiconductor processing device and is used for observing the internal conditions of the semiconductor processing device; a clearing unit, which is arranged in the semiconductor processing device and is used for clearing away a target object of the visual unit that is located on the inner side of the device; and a driving unit, which is connected to the clearing unit and is used for driving the clearing unit, so as to clear away the target object of the visual unit that is located on the inner side of the device. In the semiconductor processing device of the present invention, a clearing unit is provided for a visual unit in a matching manner, so as to collaborate with the visual unit in monitoring a semiconductor processing process, thereby facilitating precise control over the technologi</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20231101&amp;DB=EPODOC&amp;CC=TW&amp;NR=202343618A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20231101&amp;DB=EPODOC&amp;CC=TW&amp;NR=202343618A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WANG, CHEN</creatorcontrib><creatorcontrib>JIA, ZHAO-WEI</creatorcontrib><creatorcontrib>WANG, HUI</creatorcontrib><creatorcontrib>YANG, HONGAO</creatorcontrib><creatorcontrib>WANG, JIAN</creatorcontrib><title>Semiconductor processing device</title><description>The present invention relates to the technical field of semiconductor devices. Provided is a semiconductor processing device. The semiconductor processing device comprises: a visual unit, which is arranged on a shell of the semiconductor processing device and is used for observing the internal conditions of the semiconductor processing device; a clearing unit, which is arranged in the semiconductor processing device and is used for clearing away a target object of the visual unit that is located on the inner side of the device; and a driving unit, which is connected to the clearing unit and is used for driving the clearing unit, so as to clear away the target object of the visual unit that is located on the inner side of the device. In the semiconductor processing device of the present invention, a clearing unit is provided for a visual unit in a matching manner, so as to collaborate with the visual unit in monitoring a semiconductor processing process, thereby facilitating precise control over the technologi</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJAPTs3NTM7PSylNLskvUigoyk9OLS7OzEtXSEkty0xO5WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8SHhRgZGxibGZoYWjsbEqAEAXE8lgA</recordid><startdate>20231101</startdate><enddate>20231101</enddate><creator>WANG, CHEN</creator><creator>JIA, ZHAO-WEI</creator><creator>WANG, HUI</creator><creator>YANG, HONGAO</creator><creator>WANG, JIAN</creator><scope>EVB</scope></search><sort><creationdate>20231101</creationdate><title>Semiconductor processing device</title><author>WANG, CHEN ; JIA, ZHAO-WEI ; WANG, HUI ; YANG, HONGAO ; WANG, JIAN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW202343618A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>WANG, CHEN</creatorcontrib><creatorcontrib>JIA, ZHAO-WEI</creatorcontrib><creatorcontrib>WANG, HUI</creatorcontrib><creatorcontrib>YANG, HONGAO</creatorcontrib><creatorcontrib>WANG, JIAN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WANG, CHEN</au><au>JIA, ZHAO-WEI</au><au>WANG, HUI</au><au>YANG, HONGAO</au><au>WANG, JIAN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Semiconductor processing device</title><date>2023-11-01</date><risdate>2023</risdate><abstract>The present invention relates to the technical field of semiconductor devices. Provided is a semiconductor processing device. The semiconductor processing device comprises: a visual unit, which is arranged on a shell of the semiconductor processing device and is used for observing the internal conditions of the semiconductor processing device; a clearing unit, which is arranged in the semiconductor processing device and is used for clearing away a target object of the visual unit that is located on the inner side of the device; and a driving unit, which is connected to the clearing unit and is used for driving the clearing unit, so as to clear away the target object of the visual unit that is located on the inner side of the device. In the semiconductor processing device of the present invention, a clearing unit is provided for a visual unit in a matching manner, so as to collaborate with the visual unit in monitoring a semiconductor processing process, thereby facilitating precise control over the technologi</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Semiconductor processing device
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-28T01%3A34%3A56IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=WANG,%20CHEN&rft.date=2023-11-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ETW202343618A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true