Semiconductor processing device

The present invention relates to the technical field of semiconductor devices. Provided is a semiconductor processing device. The semiconductor processing device comprises: a visual unit, which is arranged on a shell of the semiconductor processing device and is used for observing the internal condi...

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Bibliographische Detailangaben
Hauptverfasser: WANG, CHEN, JIA, ZHAO-WEI, WANG, HUI, YANG, HONGAO, WANG, JIAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention relates to the technical field of semiconductor devices. Provided is a semiconductor processing device. The semiconductor processing device comprises: a visual unit, which is arranged on a shell of the semiconductor processing device and is used for observing the internal conditions of the semiconductor processing device; a clearing unit, which is arranged in the semiconductor processing device and is used for clearing away a target object of the visual unit that is located on the inner side of the device; and a driving unit, which is connected to the clearing unit and is used for driving the clearing unit, so as to clear away the target object of the visual unit that is located on the inner side of the device. In the semiconductor processing device of the present invention, a clearing unit is provided for a visual unit in a matching manner, so as to collaborate with the visual unit in monitoring a semiconductor processing process, thereby facilitating precise control over the technologi