Plasma processing device, analysis device, plasma processing method, analysis method, plasma processing program, and analysis program

The present invention searches, in a shorter time period, a plasma generation high frequency for a frequency which minimizes the power of a reflection wave that is reflected from a processing space. The plasma processing device comprises an inference unit which infers a setting frequency of the plas...

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Bibliographische Detailangaben
1. Verfasser: KANEKO, KAZUSHI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The present invention searches, in a shorter time period, a plasma generation high frequency for a frequency which minimizes the power of a reflection wave that is reflected from a processing space. The plasma processing device comprises an inference unit which infers a setting frequency of the plasma generation high frequency by inputting a processing condition during plasma processing to a trained model that has been trained by using training data that includes setting frequencies searched by changing the setting frequency of the plasma generation high frequency and minimizing the power of a reflection wave reflected from a processing space, and includes the processing conditions corresponding to the corresponding setting frequencies, when the plasma processing is performed in each of a plurality of processing conditions.