Negative ion generating device capable of properly irradiating negative ions on object

The invention provides a negative ion generating device capable of irradiating negative ions on an object at an appropriate time. A negative ion generating device (1) includes a negative ion generating part (4) that generates negative ions by generating plasma (P) in a chamber (2). After the negativ...

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Bibliographische Detailangaben
1. Verfasser:	KITAMI, HISASHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	The invention provides a negative ion generating device capable of irradiating negative ions on an object at an appropriate time. A negative ion generating device (1) includes a negative ion generating part (4) that generates negative ions by generating plasma (P) in a chamber (2). After the negative ion generating part (4) stops the plasma (P), a substrate (11) can be irradiated with negative ions. Accordingly, the negative ion generating device (1) further includes a detection unit (40) that detects disappearance of the plasma (P). After the negative ion generation device (1) can confirm the disappearance of the plasma (P) using the detection unit (40), the substrate (11) can be irradiated with negative ions. Accordingly, the substrate (11) can be irradiated with negative ions at an appropriate time.