Integrated light source device and optical inspection system comprising thereof
The present disclosure provides an integrated light source device and optical inspection system comprising thereof. The integrated light source device includes a first light source, a light-guiding element, a second light source and a light-splitting element. The first light source provides a first...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present disclosure provides an integrated light source device and optical inspection system comprising thereof. The integrated light source device includes a first light source, a light-guiding element, a second light source and a light-splitting element. The first light source provides a first light beam via a first illumination path. The light-guiding element has a guiding part and a reflection part. The guiding part guides the first light beam via the first illumination path. The second light source provides a second light beam to the reflection part via a second illumination path. The light-splitting element guides the second light beam, which is reflected from the reflection part, via the second illumination path. The first light beam and the second light beam converge to a preset focus point. |
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