Liquid storage device and electroplating apparatus
Disclosed in the present invention are a liquid storage device and an electroplating apparatus. The liquid storage device comprises a liquid storage tank body; the liquid storage tank body comprises a plurality of working circulation liquid discharge ports for supplying a liquid to a plurality of wo...
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| creator | JIA, ZHAO-WEI WANG, HUI YANG, HONGAO WANG, JIAN YU, JIE |
| description | Disclosed in the present invention are a liquid storage device and an electroplating apparatus. The liquid storage device comprises a liquid storage tank body; the liquid storage tank body comprises a plurality of working circulation liquid discharge ports for supplying a liquid to a plurality of working chambers, and a heat circulation liquid injection port for introducing a heated solution into the liquid storage tank body; the two opposite sidewalls of the liquid storage tank body are both provided with the working circulation liquid discharge ports; and the heat circulation liquid injection port is formed in a sidewall connecting said two sidewalls, and is close to the middle position of the length of the sidewall. The liquid storage device further comprises a flow guide member; and the flow guide member is provided in the liquid storage tank body, and is communicated with the heat circulation liquid injection port. The solution entering from the heat circulation liquid injection port is introduced into t |
| format | Patent |
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The liquid storage device comprises a liquid storage tank body; the liquid storage tank body comprises a plurality of working circulation liquid discharge ports for supplying a liquid to a plurality of working chambers, and a heat circulation liquid injection port for introducing a heated solution into the liquid storage tank body; the two opposite sidewalls of the liquid storage tank body are both provided with the working circulation liquid discharge ports; and the heat circulation liquid injection port is formed in a sidewall connecting said two sidewalls, and is close to the middle position of the length of the sidewall. The liquid storage device further comprises a flow guide member; and the flow guide member is provided in the liquid storage tank body, and is communicated with the heat circulation liquid injection port. 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| subjects | APPARATUS THEREFOR CHEMISTRY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS |
| title | Liquid storage device and electroplating apparatus |
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