Liquid storage device and electroplating apparatus

Disclosed in the present invention are a liquid storage device and an electroplating apparatus. The liquid storage device comprises a liquid storage tank body; the liquid storage tank body comprises a plurality of working circulation liquid discharge ports for supplying a liquid to a plurality of wo...

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Bibliographische Detailangaben
Hauptverfasser: JIA, ZHAO-WEI, WANG, HUI, YANG, HONGAO, WANG, JIAN, YU, JIE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Disclosed in the present invention are a liquid storage device and an electroplating apparatus. The liquid storage device comprises a liquid storage tank body; the liquid storage tank body comprises a plurality of working circulation liquid discharge ports for supplying a liquid to a plurality of working chambers, and a heat circulation liquid injection port for introducing a heated solution into the liquid storage tank body; the two opposite sidewalls of the liquid storage tank body are both provided with the working circulation liquid discharge ports; and the heat circulation liquid injection port is formed in a sidewall connecting said two sidewalls, and is close to the middle position of the length of the sidewall. The liquid storage device further comprises a flow guide member; and the flow guide member is provided in the liquid storage tank body, and is communicated with the heat circulation liquid injection port. The solution entering from the heat circulation liquid injection port is introduced into t