Reaction furnace for moisture generation

To provide a reaction furnace for moisture generation capable of achieving a higher moisture generation ratio while preventing the risk of ignition. The present invention comprises: a reaction furnace main body 6 which has an inlet 2 and an outlet 4 for a gas; a first reflecting plate 7 which is dis...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HIRAO, KEIJI, MINAMI, YUKIO, YOSHIDA, MAKITO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a reaction furnace for moisture generation capable of achieving a higher moisture generation ratio while preventing the risk of ignition. The present invention comprises: a reaction furnace main body 6 which has an inlet 2 and an outlet 4 for a gas; a first reflecting plate 7 which is disposed to face the outlet 4, and fixed to the inside of the reaction furnace main body 6 while maintaining a gap G2 with an inner wall surface of the reaction furnace main body 6, and which has a tapered portion 10 at a peripheral edge portion facing the inner wall surface of the reaction furnace main body 6; a first platinum catalyst layer 9 which is coated on the inner wall surface of the reaction furnace main body 6; and a second platinum catalyst layer 11 which is coated on an outer surface of the first reflecting plate 7, which is a side opposing the reaction furnace main body 6 and disposed more inward than the tapered portion 10.