Semiconductor device and power amplifier
A semiconductor device includes: a substrate; a channel layer disposed on the substrate; and a barrier layer disposed on the channel layer. The semiconductor device further includes: a gate electrode disposed on the barrier layer; a source electrode and a drain electrode disposed on the barrier laye...
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Zusammenfassung: | A semiconductor device includes: a substrate; a channel layer disposed on the substrate; and a barrier layer disposed on the channel layer. The semiconductor device further includes: a gate electrode disposed on the barrier layer; a source electrode and a drain electrode disposed on the barrier layer and respectively at opposite sides of the gate electrode; and a spike region formed below at least one of the source electrode and the drain electrode. The spike region includes titanium nitride. |
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