Pellicle
Provided is a pellicle in which the membrane stress in the pellicle film is adjusted to be suitable, distortion due to turbulent flow, etc., is kept under control, and the structural stability is excellent. A pellicle (1) is provided with a rectangular frame (2), a pellicle film (3) provided to one...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Provided is a pellicle in which the membrane stress in the pellicle film is adjusted to be suitable, distortion due to turbulent flow, etc., is kept under control, and the structural stability is excellent. A pellicle (1) is provided with a rectangular frame (2), a pellicle film (3) provided to one surface of the frame (2), and a mask adhesive (4) provided to the other surface of the frame (2). The length of the longer side of the frame (2) is 600 mm or greater and the length of the shorter side is 500 mm or greater. The pellicle is characterized in that when a predetermined air-blast flutter experiment is carried out, the sum of displacement (T1) in a first direction and displacement (T2) in a second direction ([Delta] displacement = T1 + T2) is between 1.50 mm and 2.80 mm, and the greater of a maximum displacement (T1max) in the first direction and a maximum displacement (T2max) in the second direction (flutter amounts) is between 1.00 mm and 2.40 mm. |
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