Semiconductor device

A semiconductor device including a substrate; storage node contacts on the substrate; lower electrode structures on the storage node contacts; a supporter structure on an external side surface of the lower electrode structures and connecting adjacent lower electrode structures to each other; a diele...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HONG, JUNG-PYO, PARK, SANG-WUK, LEE, SANG-HO, KIM, YONG-HWAN, SUH, MIN-KYU, KIM, YANG-DOO
Format: Patent
Sprache:chi ; eng
Online-Zugang:Volltext bestellen
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Beschreibung
Zusammenfassung:A semiconductor device including a substrate; storage node contacts on the substrate; lower electrode structures on the storage node contacts; a supporter structure on an external side surface of the lower electrode structures and connecting adjacent lower electrode structures to each other; a dielectric layer on the lower electrode structures and the supporter structure; and an upper electrode structure on the dielectric layer, wherein the lower electrode structures each include a pillar portion in contact with the storage node contacts; and a cylinder portion on the pillar portion, the pillar portion includes a first lower electrode layer having a cylindrical shape and having a lower surface and a side surface; and a first portion covering at least an internal wall of the first lower electrode layer, and the cylinder portion includes a second portion extending from the first portion and covering an upper end of the first lower electrode layer.