Semiconductor memory devices

A semiconductor memory device includes a substrate including a memory cell region, a plurality of capacitor structures arranged in the memory cell region of the substrate and including a plurality of lower electrodes, a capacitor dielectric layer, and an upper electrode, a first support pattern cont...

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Bibliographische Detailangaben
Hauptverfasser: PARK, JIN-YOUNG, HONG, JUNG-PYO, PARK, SANG-WUK, KIM, YONG-HWAN, PARK, SUNG-HYUN, SUH, MIN-KYU, KIM, YANG-DOO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A semiconductor memory device includes a substrate including a memory cell region, a plurality of capacitor structures arranged in the memory cell region of the substrate and including a plurality of lower electrodes, a capacitor dielectric layer, and an upper electrode, a first support pattern contacting sidewalls of the plurality of lower electrodes of the plurality of capacitor structures to support the plurality of lower electrodes, and a second support pattern located at a higher vertical level than a vertical level of the first support pattern and contacting the sidewalls of the plurality of lower electrodes to support the plurality of lower electrodes. The plurality of lower electrodes have a plurality of recessed electrode portions, respectively, in upper portions of the plurality of lower electrodes.