Semiconductor memory device

A semiconductor memory device may include a lower layer including a first region and a second region, the lower layer extending in a first direction and a second direction perpendicular to the first direction, and a stack including word lines and interlayer insulating patterns, which are alternating...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LEE, KI-SEOK, JUNG, SEUNG-JAE, LEE, HAE-JOON, CHOI, HYUN-GEUN
Format: Patent
Sprache:chi ; eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A semiconductor memory device may include a lower layer including a first region and a second region, the lower layer extending in a first direction and a second direction perpendicular to the first direction, and a stack including word lines and interlayer insulating patterns, which are alternatingly stacked in a third direction perpendicular to the first direction and the second direction, the stack having a staircase structure on the second region. The word lines may extend from the first region to the second region in the first direction. Each of the word lines may include sub-gate electrodes, which extend parallel to each other in the first region, and a word line pad, which is connected in common to the sub-gate electrodes in the second region.