Pellicle membrane

A pellicle membrane for a lithographic apparatus, wherein the pellicle membrane comprises metal silicide and a reinforcing network. The reinforcing network can be located between metal silicide layers. The reinforcing network can be irregular. The reinforcing network includes windows with a maximum...

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Bibliographische Detailangaben
Hauptverfasser:	AGRICOLA, FRANCISCUS THEODORUS, VAN DER WOORD, TIES WOUTER, DE GRAAF, DENNIS, SI, FAI TONG, ROLLIER, ANNE-SOPHIE, GIESBERS, ADRIANUS JOHANNES MARIA, BIRON, MAXIME, DONMEZ NOYAN, INCI, ANDE, CHAITANYA KRISHNA, FERRE LLIN, LOURDES
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A pellicle membrane for a lithographic apparatus, wherein the pellicle membrane comprises metal silicide and a reinforcing network. The reinforcing network can be located between metal silicide layers. The reinforcing network can be irregular. The reinforcing network includes windows with a maximum dimension of up to 20 microns. The reinforcing network includes windows having an average size of at least 5 microns.