Film-mask fixture and needle alignment device for probe card

A film-mask fixture includes a frame body and a transparent substrate. The frame body has a hollow window. The transparent substrate is rigid and is arranged on the hollow window of the frame body for a film-mask to be flatly attached on the transparent substrate. The film-mask fixture can support t...

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Bibliographische Detailangaben
Hauptverfasser:	FU, CHUNG-HUA, HSIAO, TING-YUN, HU, MENG-LIN, YEH, QI-XIAN, TSAI, YUCHANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A film-mask fixture includes a frame body and a transparent substrate. The frame body has a hollow window. The transparent substrate is rigid and is arranged on the hollow window of the frame body for a film-mask to be flatly attached on the transparent substrate. The film-mask fixture can support the film-mask through the transparent substrate, so as to increase the flatness of the film-mask, thereby improving the accuracy of adjusting the needle position. A needle alignment device for probe card including the above-mentioned film-mask fixture is also disclosed.