Turbomolecular vacuum pump and associated method
Turbomolecular vacuum pump (1) having a stator (2), a rotor (3) configured to rotate in the stator (2) and a motor (16) configured to drive the rotation of the rotor (3), characterized in that the turbomolecular vacuum pump (1) moreover has a temperature sensor (23) configured to measure the tempera...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Turbomolecular vacuum pump (1) having a stator (2), a rotor (3) configured to rotate in the stator (2) and a motor (16) configured to drive the rotation of the rotor (3), characterized in that the turbomolecular vacuum pump (1) moreover has a temperature sensor (23) configured to measure the temperature of the rotor (3) and a creep maintenance counter (24) configured to determine an increment for the creep of the rotor (3) over a predetermined period of time on the basis of the temperature of the rotor (3) measured by the temperature sensor (23), the rotational speed of the rotor (3), the value for the creep of the rotor, and the correspondence table, to increment the value for the creep of the rotor by the determined increment for the creep, and determine, on the basis of the incremented value for the creep, information representative of a period of time remaining before preventative maintenance of the rotor for creep. |
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