Compound, production method for said compound, leveling agent, coating composition, resist composition, and article

Provided is a compound that is capable of functioning as a leveling agent that imparts high smoothness and an effect of inhibiting pin unevenness to a coating film. Specifically, the compound has polymer blocks of polymerizable monomers at both terminals of a silicone chain. The level of dispersion...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: UENO, JUNPEI, FUJIWARA, RYUTA
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Provided is a compound that is capable of functioning as a leveling agent that imparts high smoothness and an effect of inhibiting pin unevenness to a coating film. Specifically, the compound has polymer blocks of polymerizable monomers at both terminals of a silicone chain. The level of dispersion (Mw/Mn), which is the ratio of the weight-average molecular weight to the number-average molecular weight of the compound, is in the range of 1.0-2.0.