Apparatus for and method of conditioning laser electrodes

Disclosed are apparatus for and methods of passivating a first electrode normally serving as a cathode in a laser discharge chamber also including a second electrode normally serving as an anode by supplying reversed polarity pulses to the first electrode either during part of a chamber manufacturin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG, YU-DA, YOU, CHANG-QI, MELCHER, PAUL CHRISTOPHER, EFFENBERGER, ANDREW JAY JR
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
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