Apparatus for and method of conditioning laser electrodes

Apparatus for and method of conditioning laser electrodes

Disclosed are apparatus for and methods of passivating a first electrode normally serving as a cathode in a laser discharge chamber also including a second electrode normally serving as an anode by supplying reversed polarity pulses to the first electrode either during part of a chamber manufacturin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG, YU-DA, YOU, CHANG-QI, MELCHER, PAUL CHRISTOPHER, EFFENBERGER, ANDREW JAY JR
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
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Beschreibung
Zusammenfassung:Disclosed are apparatus for and methods of passivating a first electrode normally serving as a cathode in a laser discharge chamber also including a second electrode normally serving as an anode by supplying reversed polarity pulses to the first electrode either during part of a chamber manufacturing passivation procedure or intermittently or on demand after the chamber has been put in service.