Substrate holder and method of producing substrate holder

The present disclosure is to provide, in a substrate holder in which a plurality of electrodes is embedded or buried, a technique for reducing the number of terminals configured to supply the electric power to each of the electrodes. In the present embodiment, the substrate holder 100 is provided wi...

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Bibliographische Detailangaben
Hauptverfasser:	TAKAHASHI, KAZUYA, MORITA, NAOTOSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The present disclosure is to provide, in a substrate holder in which a plurality of electrodes is embedded or buried, a technique for reducing the number of terminals configured to supply the electric power to each of the electrodes. In the present embodiment, the substrate holder 100 is provided with the ceramic base member 110, the electrodes 121 to 123, the conductive members 131 to 133, the connecting parts 141 to 145, the terminals 151 to 154 and the lands 171 and 172 are embedded in the ceramic base member 110.