Laser processing apparatus capable of accurately determining a processing state from a processing sound without being affected by environmental sounds
The object of the present invention is to provide a laser processing apparatus capable of accurately determining a processing state based on a processing sound without being affected by environmental sounds. The solution of the present invention is a laser processing apparatus 1, which includes: a w...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The object of the present invention is to provide a laser processing apparatus capable of accurately determining a processing state based on a processing sound without being affected by environmental sounds. The solution of the present invention is a laser processing apparatus 1, which includes: a work chuck table 10 configured to hold a workpiece 100; a laser beam irradiation unit 20 configured to irradiate the workpiece 100 held on the work chuck table 10 with a laser beam 21 having a wavelength that is absorptive to the workpiece 100; and a control unit 90 configured to control each component. The laser processing apparatus 1 has a sound collecting mechanism 50 that collects the sound generated when the workpiece 100 held on the work chuck table 10 is ablated by irritation of the laser beam 21. The control unit 90 includes an analysis unit 91 and a determination unit 92, the analysis unit 91 extracts a sound having a frequency corresponding to the repetition frequency of the laser beam 21 from the sounds c |
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