Lift device and method for using same

To achieve an increase in size and densification of a receptor substrate and shorten a tact time in a lift device while maintaining a high accuracy of a lift position. A lift device is constructed with stage groups each of which moves while holding a donor substrate with a lift object mounted thereo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMAOKA, HIROSHI, OZAWA, SHUSAKU, NAKADA, SATOKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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