Lift device and method for using same

To achieve an increase in size and densification of a receptor substrate and shorten a tact time in a lift device while maintaining a high accuracy of a lift position. A lift device is constructed with stage groups each of which moves while holding a donor substrate with a lift object mounted thereo...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAOKA, HIROSHI, OZAWA, SHUSAKU, NAKADA, SATOKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	To achieve an increase in size and densification of a receptor substrate and shorten a tact time in a lift device while maintaining a high accuracy of a lift position. A lift device is constructed with stage groups each of which moves while holding a donor substrate with a lift object mounted thereon and/or a beam shaping optical system and a reduction projection optical system, and a stage group for supporting a receptor substrate that is a lift destination, the donor groups and the stage group being formed on separate surface plates. Thereby, the lift device minimizes the vibration accompanying relative scanning of each substrate with respect to laser light and anomalies in the accuracy of a synchronization position for the stages used for the scanning.