Manufacturing plant and method for installing apparatus in manufacturing plant

A manufacturing plant P1 according to one embodiment of the present invention comprises: a processing system 1 that is provided with a processing device 2 having a process chamber 3 to which is supplied a gas received at a gas introduction port 5A; a heat transfer medium supply system 10 that is pro...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAKAYAMA, MICHIO, YAMAGUCHI, SYUNJI, MORIMUNE, AYUMI, AOKI, KOICHIRO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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