Manufacturing plant and method for installing apparatus in manufacturing plant
A manufacturing plant P1 according to one embodiment of the present invention comprises: a processing system 1 that is provided with a processing device 2 having a process chamber 3 to which is supplied a gas received at a gas introduction port 5A; a heat transfer medium supply system 10 that is pro...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | A manufacturing plant P1 according to one embodiment of the present invention comprises: a processing system 1 that is provided with a processing device 2 having a process chamber 3 to which is supplied a gas received at a gas introduction port 5A; a heat transfer medium supply system 10 that is provided with a gas supply device 100 that supplies the gas from a gas supply port 11B; and a duct 30 that connects the gas introduction port 5A and the gas supply port 11B. The angle formed with respect to the vertical direction by a straight line L1 connecting the center of the gas supply port 11B and the center of the gas introduction port 5A is 0-45 degrees. |
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