Transformer coupled plasma source design for thin dielectric film deposition

Transformer coupled plasma source design for thin dielectric film deposition

Plasma generator systems are provided. Plasma generators, or plasma sources, may flow process gas into a plasma to generate ions, neutral particles, and/or radicals that may be used to physically and/or chemically alter a substrate. In some implementations, the plasma source may be designed to impro...

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Bibliographische Detailangaben
Hauptverfasser: QIU, HUA-TAN, MCKERROW, ANDREW JOHN, KHOJASTEH, MALAK, GUO, TONG-TONG, CHEN, LEE, GONG, BO, BATZER, RACHEL E, JUAREZ, FRANCISCO J, GUI, ZHE
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:Plasma generator systems are provided. Plasma generators, or plasma sources, may flow process gas into a plasma to generate ions, neutral particles, and/or radicals that may be used to physically and/or chemically alter a substrate. In some implementations, the plasma source may be designed to improve associated fabrication operations.