EUV transmissive film

Provided is an EUV transmissive film exhibiting not only EUV transmittance but also high IR emissivity. This EUV transmissive film has an EUV transmittance of at least 80% at a wavelength of 13.5nm, and comprises a main layer that has an IR emissivity of at least 2.0% at a wavelength of 2[mu]m, and...

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Bibliographische Detailangaben
Hauptverfasser:	CHAEN, HIROKI, GORIKI, NAOKI, TANIMURA, TAKASHI, KASHIWAYA, TOSHIKATSU, KONDO, ATSUO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	Provided is an EUV transmissive film exhibiting not only EUV transmittance but also high IR emissivity. This EUV transmissive film has an EUV transmittance of at least 80% at a wavelength of 13.5nm, and comprises a main layer that has an IR emissivity of at least 2.0% at a wavelength of 2[mu]m, and a protective layer that covers at least one side of the main layer and has an IR transmittance of at least 70% at a wavelength of 2[mu]m.