Substrate supporter, plasma processing apparatus, and plasma processing method

There is provided a substrate supporter supporting a substrate comprising a base, a first ceramic layer on the base, and a second ceramic layer on the first ceramic layer. The first ceramic layer has a first base portion made of a first ceramic, and a plurality of heater electrodes included in the f...

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Bibliographische Detailangaben
Hauptverfasser:	KAWABATA, ATSUSHI, KOIWA, SHINGO, KUDO, YASUHISA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	There is provided a substrate supporter supporting a substrate comprising a base, a first ceramic layer on the base, and a second ceramic layer on the first ceramic layer. The first ceramic layer has a first base portion made of a first ceramic, and a plurality of heater electrodes included in the first base portion and for adjusting a temperature of the substrate. The second ceramic layer has a second base portion made of a second ceramic different from the first ceramic, and an adsorption electrode included in the second base portion and for holding the substrate.